Advanced Process Control and Automation: 27 February, 2003, Santa Clara, California, USA, Volume 5044

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Matt Hankinson, Christopher P. Ausschnitt, Society of Photo-optical Instrumentation Engineers
SPIE, 2003 - Technology & Engineering - 182 pages
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Contents

Optimal modelpredictive control of overlay lithography implemented in an ASIC
12
Recursive least squares estimation and its application to shallow trench isolation 504416
16
Knowledgebased APC methodology for overlay control 504404
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