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Recent developments in the study of mechanical properties of thin films
Preparation of epitaxial magnetic garnet films by chemical vapor deposition
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absorption activation energy adsorption annealing Appl Application of Thin atoms band bulk capacitors carrier CdSe characteristics circuits coefficient components conduction band conductivity Conf Conference on Thin crystalline crystallites crystals curves decrease defects density devices dielectric dislocations effect electron microscope energy epitaxial evaporated experimental film thickness films deposited function gold gold films grain growth heterojunction increase InSb integrated circuits interface International Conference layer magnetoresistance material measurements metal films mica micrographs misfit mobility Non-Cryst nucleation nuclei observed obtained optical orientation oxide oxygen Paper presented parameters permalloy phase PHOTORESIST Phys Proc properties Received May 16 resistance resistor room temperature sample semiconductor shown in Fig shows silicon single-crystal specimen spin wave sputtering strain stress structure substrate substrate temperature switching tantalum technique Technol thermal thermopower thin film circuits Thin Films Thin Solid Films torr traps vacuum vacuum-deposited Venice voltage