Atomistic simulation of Cu/Ta thin film deposition and other phenomena

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Delft University Press, 2004 - Science - 81 pages
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Contents include: Introduction, Thin Ta films: growth, stability, and diffusion studied by molecular dynamics simulations, Molecular dynamics study of Cu thin film deposition on B-Ta, Molecular dynamics simulations of Cu/Ta and Ta/Cu thin film growth, The interaction of N with atomically dispersed Ti, V, Cr, Mo, and Ni in ferritic steel, Density functional theory study of alloy element interstitials in Al, Summary.

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Contents

growth stability and diffusion studied by Molecular
11
Molecular Dynamics study of Cu thin film deposition on PTa
25
Molecular Dynamics simulations of CuTa and TaCu thin film growth
31
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