Auger Microprobe Analysis,

Front Cover
Taylor & Francis, Jan 1, 1989 - Technology & Engineering - 400 pages
Auger analysis can be used to identify all elements and is increasingly found in surface science laboratories as a means of producing compositional maps of surfaces at submicron resolutions. Auger Microprobe Analysis is both a working manual and a useful book of reference for experienced and inexperienced scientists in industrial, academic, or government laboratories. It describes the different types of Auger Microprobe and how they can be used to solve problems in many fields such as microcircuitry, materials failure, corrosion, tribology and environmental sampling. The book gives a thorough grounding in the subject, and for the scientist about to set up an Auger laboratory, there is detailed practical advice which is based upon the author's own experience. The book covers every facet of Auger analysis including ultra high vacua, Auger signal detection, secondary electron microscopy and chemical bonding effects. It contains an extensive Auger related glossary and gives tables essential for qualitative and quantitative Auger analysis.

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Contents

The Auger process
10
Secondary emission
37
The role of chemistry in Auger analysis
55
Copyright

12 other sections not shown

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About the author (1989)

Ferguson, Northern Research Laboratories, UKAEA, UK.

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