Binary optics technology: the theory and design of multi-level diffractive optical elements
Massachusetts Institute of Technology, Lincoln Laboratory, 1989 - Diffraction - 47 pages
Multi-level diffractive phase have the potential to significantly improved the performance of many conventional lens systems. The theory, design and fabrication of these diffractive profiles are described in detail. Basic examples illustrate the potential usefulness, as well as the limitations, of these elements. Keywords: Binary optics; Diffractive optical elements.
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APPLICATIONS OF MULTILEVEL DIFFRACTIVE PROFILES
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100-percent diffraction efficiency approximation aspheric average diffraction efficiency BINARY OPTICS chromatic aberration chromatic and spherical chromatic dispersion CODE completely diffractive lens constrain the diffractive continuous phase profile depth error diffraction order diffractive lens profile DIFFRACTIVE OPTICAL ELEMENTS diffractive phase functions diffractive phase profile diffractive profile diffractive surface diffractively corrected lens discrete phase levels Equation 6.3 etch depth fabrication process field of view finite wavelength band first-order diffraction efficiency focal length function of wavelength fused silica lens incident light integrated circuit lens design program lens system lenses Lincoln Laboratory lithographic mask multi-level diffractive phase multi-level structure optical system parameters pattern percent phase aberration phase term point sources point spread function radial values radially symmetric reactive ion etching refractive lens refractive/diffractive achromat REFRACTIVE/DIFFRACTIVE ELEMENTS relief phase grating remaining photoresist Section sequence file set of lithographic shown in Figure spherical aberration substrate surface relief grating surface relief phase transmittance function wavefront zero