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a Conventional MEMS design process b MEMS design process
MEMS Design Synthesis and Casebased Reasoning Systems
Flowchart of general MEMS synthesis process
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Achieved adaptation allow analysis application applied approach average beams behavior better bounding case-based reasoning CaSyn-MEMS CBR Rank CBR system CBR test Chapter components computation concept constraints contains created database defined demonstrated design requirements developed deviation from target device documents domain enable Engineering evolutionary example experiment fabrication Figure filter focused folded flexure frequency function further geometrical given goal horizontal implemented indexing initial design input instances Kamalian keyword kHz Area knowledge linkage mass mechanical MEMS design MEMS design synthesis method Microelectromechanical Systems Minimum Area modeling MOGA objectives ontology parametric optimization Pareto optimal solutions performance presented problem relaxing representation represented resonator results for CBR retrieval scheme selection shown similar simulation solutions starting stiffness ratio structure successful SUGAR suspension symmetry Table target fo thesaurus tool topology types utilized variants vertical Zhang