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The Continuum Model of Directional Effects
Computer Simulation of Channeling
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aligned amorphous amplitude approximation Atomic Collision axial channeling axis backscattering Bloch waves blocking dips bombardment Bragg angle calculated channeled ions channeled trajectories channeling effect classical classical mechanics computer simulation continuum potential corresponding critical angle curve dechanneling defects density dependence depth detector diffraction direction disorder displacement distance dopant elastic emission energy loss equation experimental experiments flux foreign atoms function germanium helium high energy impact parameter implanted incident beam incident ion increase inelastic scattering intensity interaction interstitial ion beam Ion Implantation Kikuchi layer Lett Lindhard low energy measurements MeV protons minimum yield momentum multiple scattering normal nuclear nucleus observed obtained oscillations peak penetration Phys planar channeling positrons protons quasi-channeled radiation damage random range profiles recoil region Rutherford scattering Section semiconductors shown in Figure silicon single crystal solid spectra spectrum stopping power studies target technique temperature theory thermal vibrations thickness transverse energy transverse plane tungsten values velocity wavelength width