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Introduction and Organization of the Book
Imaging Microscopes for Microelectronics
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Algorithm alignment analysis annular ring applied array Basic Steps beam-induced currents binary image CAD layout calculation cameras cell Chapter circuit circular buffering computer vision conductor connected components defects detector device device under test EBIC edge edge detection electrical testing electron elements emissivity errors example expert system feature extraction Figure filter fluorescence function geometrical graph gray-level holes illumination image processing input inspection system Knowledge bases knowledge-based labels laser laser scanning layer light linewidth logic magnification mask measurement microscopy minimum node OBIC object operations optical output package pads pattern PCB inspection photoresist PINHOLE pixel probe procedure Programming quantization quantization levels reference region registration resolution sample Section segmentation sensor sensor fusion sequence signal solder spatial strobe substrate surface Table technique testers thresholding types Typical values vision systems visual voltage Wafer inspection wavelength width window wire X-ray