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Introduction and Organization of the Book
Imaging Microscopes for Microelectronics
Metrology in Electronic Devices and Substrates
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Algorithm alignment analysis annular ring applied array Basic Steps beam-induced currents binary image bubble memory CAD layout calculation cameras cell Chapter circuit computer vision conductor connected components defect geometries defects detector device device under test EBIC edge edge detection electrical testing electron elements emissivity errors example feature extraction Figure filter fluorescence function geometrical graph gray-level holes illumination image processing input inspection system Knowledge bases knowledge-based labels laser laser beam laser scanning layer light linewidth logic magnification mask measurement microscopy minimum node OBIC object operations optical output package pads pattern PCB inspection photoresist PINHOLE pixel probe procedure Programming quantization quantization levels reference region registration resolution sample Section segmentation sensor sensor fusion sequence signal solder spatial strobe substrate surface Table technique testers thresholding Typical values vision systems voltage Wafer inspection wavelength width window wire X-ray