Cryopumping: Theory and Practice
This book covers the physical theory, practical techniques, and applications of cryopumping--the production of a vacuum through the use of low temperatures. The importance of this technique has increased greatly in recent years due to the proliferation of new uses and the demand in many vacuum procedures for ultraclean gas atmospheres, low final pressures, and high specific pumping speeds. The author reviews recent developments that have resulted in safer pumps that allow full automation and that are superior to conventional pumps in installation and operation costs.
What people are saying - Write a review
We haven't found any reviews in the usual places.
GAS FLOW AT LOW PRESSURE
CRYOCONDENSATION OF UNIFORM GASES
CRYOSORPTION ON GAS CONDENSATES
9 other sections not shown
2th Int accelerators activated charcoal adsorbent adsorption argon baffle beam Brayton cycle cold wall components compressor condensation surface Congr connected container cryocondensation Cryog Cryogenics cryopanel cryosorption cryostat cryosurface cryotrapping crystallite curve decreases density diameter diffusion pump Electron Microscopy energy Engng 33 Engng Conf enthalpy evaporation example flange flow rate fusion gas condensates gas flow gases gauge HAEFER HALAMA heat exchanger helium high vacuum hydrogen inlet pressure Instrum insulation ionization gauge KLIPPING Leybold liquid LN2 cooled low pressure low temperatures maximum mbar measured microscope molecular sieve molecules p/pf particles Phys plasma pool-type cryopump Proc produced radiation shield ratio refrigeration power refrigerator cryopump Section shown in Fig sorption panel space simulation sputtering stage sticking coefficient storage rings superinsulation Symp Table tank Tech Technol temperature Tk thermal conductivity thermal load titanium transfer tube vacuum chamber vacuum system valve vapour pressure Vide