Cryopumping: Theory and Practice

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Clarendon Press, 1989 - Technology & Engineering - 435 pages
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This book covers the physical theory, practical techniques, and applications of cryopumping--the production of a vacuum through the use of low temperatures. The importance of this technique has increased greatly in recent years due to the proliferation of new uses and the demand in many vacuum procedures for ultraclean gas atmospheres, low final pressures, and high specific pumping speeds. The author reviews recent developments that have resulted in safer pumps that allow full automation and that are superior to conventional pumps in installation and operation costs.

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Contents

GAS FLOW AT LOW PRESSURE
11
CRYOCONDENSATION OF UNIFORM GASES
54
CRYOSORPTION ON GAS CONDENSATES
85
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