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40 keV gold angle bombarded surface bombardment along 001 channeled gold ions Chapter clusters measured contrast Cornell University darkfield dechanneling Defect cluster density defect clusters Defect clusters produced defect depth distributions defect distribution defect losses defects produced diameter Diepers Distance from Bombarded electron microscopy epitaxial Figure fraction gold films gold foil bombarded gold ion bombardment gold ions channeled gold layer gold single incident ion incident surface interstitial ion beam ions along 001 ions cm ions cm"2 ions in gold keV argon ion keV defects keV gold ions L.E. Thomas micrographs observed defects peaked phonons Phys plane point defects present quasi-channeled R.W. Balluffi radiation damage random collision range room temperature sandwich Schematic shot-in shown in Fig silver-gold single crystal stacking fault subcascades subclusters substrates thick three-subcluster cascades tion trajectories transmission electron microscopy two-subcluster cascades vacancy clusters vacancy defect vacancy rich regions vacancy type vapor deposited visible defects Whitton