Electroceramic-Based MEMS: Fabrication-Technology and Applications

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Nava Setter
Springer Science & Business Media, Mar 30, 2006 - Technology & Engineering - 414 pages
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The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics:

Part A: Applications and devices with electroceramic-based MEMS:

Chemical microsensors

Microactuators based on thin films

Micromachined ultrasonic transducers

Thick-film piezoelectric and magnetostrictive devices

Pyroelectric microsystems

RF bulk acoustic wave resonators and filters

High frequency tunable devices

MEMS for optical functionality

Part B: Materials, fabrication technology, and functionality:

Ceramic thick films for MEMS

Piezoelectric thin films for MEMS

Materials and technology in thin films for tunable high frequency devices

Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics

Microfabrication of piezoelectric MEMS

Nano patterning methods for electroceramics

Soft lithography emerging techniques

The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field.

The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.

 

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Contents

MEMSBased Thin Film and Resonant Chemical Sensors
3
Microactuators Based on Thin Films
18
Micromachined Ultrasonic Transducers and Acoustic Sensors
37
ThickFilm Piezoelectric and Magnetostrictive Devices
49
Micromachined Infrared Detectors Based on Pyroelectric
80
RF Bulk Acoustic Wave Resonators and Filters
115
High Frequency Tuneable Devices Based on Thin
132
MEMS for Optical Functionality
157
Thin Film Piezoelectrics for MEMS
198
Science and Technology of High Dielectric Constant Thin
217
Permittivity Tunability and Loss in Ferroelectrics
235
Microfabrication of Piezoelectric MEMS
325
NonConventional Micro and Nanopatterning Techniques
360
LowCost Patterning of Ceramic Thin Films
387
Index
411
Copyright

Ceramic Thick Films for MEMS
177

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