Energy Dispersive X-ray Analysis in the Electron Microscope
This book provides an in-depth description of x-ray microanalysis in the electron microscope. It is sufficiently detailed to ensure that novices will understand the nuances of high-quality EDX analysis. Includes information about hardware design as well as the physics of x-ray generation, absorption and detection, and most post-detection data processing. Details on electron optics and electron probe formation allow the novice to make sensible adjustments to the electron microscope in order to set up a system which optimises analysis. It also helps the reader determine which microanalytical method is more suitable for their planned application.
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3 The energydispersive Xray detector
4 Spectral processing
5 Energydispersive Xray microanalysis in the scanning electron microscope
6 Xray microanalysis in the transmission electron microscope
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absorption coefficient aperture application atom probe atomic number background backscattered backscattered electrons band gap beam energy beam voltage Bohr model bremsstrahlung cementite chapter characteristic X-rays composition Compton scattering correction count rate crystal deconvolution derived detected diameter discussed EDX analysis EDX detector EELS electron beam electron image electron microprobe electron microscope electron probe equation error example excited Figure film foil function Hence HPGe detectors illustrated incident electron incomplete charge collection intensity interaction interface ionization energy k-factor limit lines material matrix measurement method microanalysis number of counts obtained operator overlap particles performance pixel possible precision pulse processor quantitative analysis ratio region relatively result sample thickness scanning scanning electron microscope segregation shows Si(Li signal significant silicon drift detector simulation spatial resolution spectra spectrometers spectroscopy spherical aberration statistics surface technique typical window X-ray analysis X-ray detector X-ray mapping X-ray spectrum