Energy Dispersive X-ray Analysis in the Electron Microscope

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Garland Science, Jul 10, 2003 - Science - 160 pages
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This book provides an in-depth description of x-ray microanalysis in the electron microscope. It is sufficiently detailed to ensure that novices will understand the nuances of high-quality EDX analysis. Includes information about hardware design as well as the physics of x-ray generation, absorption and detection, and most post-detection data processing. Details on electron optics and electron probe formation allow the novice to make sensible adjustments to the electron microscope in order to set up a system which optimises analysis. It also helps the reader determine which microanalytical method is more suitable for their planned application.
 

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Contents

1 History
1
2 Principles
5
3 The energydispersive Xray detector
19
4 Spectral processing
46
5 Energydispersive Xray microanalysis in the scanning electron microscope
62
6 Xray microanalysis in the transmission electron microscope
88
7 Xray mapping
117
8 Energydispersive Xray analysis compared with other techniques
131
Bibliography
142
Index
145
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