Fundamentals of Microfabrication
Nanotechnology and microengineering are among the top priority research areas in the United States and will continue to be so during the next decade, making Fundamentals of Microfabrication an important and timely work. Written by an internationally recognized expert on sensors and sensor instrumentation who is also a leading authority on nanotechnology and microfabrication, this book will function as both a valuable textbook and a handy reference.
Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format.
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accelerometers Actuators Transducers alignment anisotropic etching anodic applications aspect ratio atoms beam bonding bulk micromachining cathode Chapter chemical sensors Conference on Solid-State density deposition devices diffusion dopant doped dry etching electrical Electro Mechanical Systems electrochemical electrons electrostatic energy epitaxial Equation etch rate etchant example fabrication flow fluid glass high aspect ratio IEEE Micro Electro integrated isotropic laser layer LIGA LPCVD machining magnetic manufacturing mask material membrane MEMS metal method Micro Electro Mechanical Microfabrication microstructures mold molecular n-type Nanotechnology nitride optical oxide packaging pattern photolithography photoresist piezoelectric planar planes plasma plate PMMA poly-Si polyimide polymer polysilicon potential pressure sensor produced radiation reaction resist semiconductor sensitivity Sensors and Actuators shown in Figure silicon Solid Solid-State Sensors solution sputtering stress structures substrate surface micromachining techniques temperature thermal thickness thin films tion typical vapor voltage wafer wet etching X-ray lithography Young's modulus
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Sensors, Nanoscience, Biomedical Engineering, and Instruments: Sensors ...
Richard C. Dorf
No preview available - 2006