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Atomic Collisions and Backscattering
Energy Loss of Light Ions and Backscattering
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4He ions absorption analyzer angular approximation atomic number atoms/cm2 Auger electron Auger electron spectroscopy Auger transitions backscattering spectrometry beam binding energy Bohr Bohr model calculated channeling Chapter collision composition corresponding Coulomb dE/dx decay density depth profiles detection detector determined elastic collision electron diffraction electron energy electron spectroscopies element emission emitted energy width equation escape depth excited factor given hydrogen impurities incident particle intensity interactions ions irradiation keV electrons kinetic energy lattice layer low energy mass materials analysis mean free path measured MeV He ions momentum monolayer neutrons nuclear energy loss nuclear reaction nucleus orbital parameter photon plasmon potential projectile quantum number radiation ratio recoil Rutherford backscattering Rutherford scattering sample scattering cross section Schematic secondary ion shell shown in Figure silicide solid spectra spectrum sputtering yield structure substrate surface peak target atom techniques thickness thin film tion transition probability values velocity wave function wavelength X-ray X-ray photoelectron spectroscopy