Gaseous Electronics Conference Radio-frequency Reference Cell: Reprint From The Journal Of Nist

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James K. Olthoff
DIANE Publishing, Jan 1, 1996 - 175 pages
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The GEC RF Reference Cell is a parallel plate, capacity-coupled, rf plasma reactor that, in principle, is suitable for studies of basic discharge phenomena, investigation of industrial-type plasmas, and theoretical modeling. This report contains 12 articles that review nearly all of the experiments and theoretical modeling efforts that have been performed over the last 5 years using GEC cells. Together, they serve as a "users' guide" to the operation and performance of the GEC cell.
 

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Page 330 - Certain commercial equipment, instruments, or materials are identified in this paper to specify adequately the experimental procedure. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose.
Page 384 - Certain commercial equipment, instruments, or materials are identified in this paper to foster understanding. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose.
Page 343 - understanding. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose.
Page 496 - The National Institute of Standards and Technology, formerly the National Bureau of Standards (NBS),
Page 384 - A schematic diagram of the experimental apparatus is shown in Fig. 1. The
Page 492 - Acknowledgments Financial support for this work was provided by the National Science Foundation
Page 370 - WL Wiese, MW Smith, and BM Miles, Atomic Transition Probabilities, Vol. II, Nati.
Page 449 - Department of Chemical and Nuclear Engineering, The University of New Mexico, Albuquerque, NM 87131
Page 355 - radiant energy per unit time per unit area per unit solid angle per unit
Page 427 - Department of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, NM 87131

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