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BRIEF REVIEW OF THE PROBEFORMING AND
B Source Brightness
C Spherical Aberration
14 other sections not shown
aberration coefficient Cg anode anode potential aperture lens aperture plane axial defocusing axial distributions beam diameter beam energy cathode Cg and Cc Chapter chromatic aberration coefficient computation current density electron beam lithography electron beam system electron energy electron trajectories electron-electron interactions electron-volt electrostatic lens electrostatic potential energy electron beams energy spread experimental Faraday cup field focusing system final lens final magnetic lens finely focused low finite element method focal length focused ion beams focused low energy Gaussian elimination keV electrons landing energy lenses low energy electron magnetic excitation magnetic field magnetic flux density Mesh set mixed field configuration Numerical Model numerical simulation optical axis optical properties particles Phys PMMA R. F. W. Pease radius retarding electrostatic field retarding field configurations Schematic view second pole-piece sequential field configuration sequential field focusing shown in Figure space charge effects spherical aberration coefficient Spherical and Chromatic spot diameter Tech thermionic wafer