Handbook of Auger Electron Spectroscopy: A Book of Reference Data for Identification and Interpretation in Auger Electron Spectroscopy "Auger Electron Spectroscopy (AES), sometimes referred to as Scanning Auger Microscopy (SAM), is widely used to investigate the elemental and chemical composition of surfaces. Analytical laboratories throughout the world ues AES to explore the first few atomic layers, to map elemental distributions in very small features, and to measure the composition of thin films. Following the publication of the first and second editions for Handbook of Auger Electron Spectroscopy, AES continued to develop. Smaller beam diameters and brighter electron sources now enable elemental images to be rapidly and routinely acquired. In addition, the quantitative interpretation of Auger spectra has improved. Increased interest in the latter as well as a need for a complete compilation of experimentally determined Auger electron energies has led to the publication of the third edition. As with the previous handbooks, all data were acquired using a cylindrical mirror analyzer (CMA). The data in this edition have been acquired using a rigorous calibration procedure. This edition is an update to the previous handbooks and also includes several elements not contained in the previous editions."--Preface |
