Handbook of Quality Integrated Circuit Manufacturing

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Academic Press, Dec 2, 2012 - Technology & Engineering - 583 pages
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Here is a comprehensive practical guide to entire wafer fabrication process from A to Z. Written by a practicing process engineer with years of experience, this book provides a thorough introduction to the complex field of IC manufacturing, including wafer area layout and design, yield optimization, just-in-time management systems, statistical quality control, fabrication equipment and its setup, and cleanroom techniques. In addition, it contains a wealth of information on common process problems: How to detect them, how to confirm them, and how to solve them. Whether you are a new enginner or technician just entering the field, a fabrication manager looking for ways to improve quality and production, or someone who would just like to know more about IC manufacturing, this is the book you're looking for.
  • Provides a readable, practical overview of the entire wafer fabrication process for new engineers and those just entering this complex field
  • Enables engineers and managers to improve production, raise quality levels, and solve problems that commonly occur in the fabrication process
  • Presents the latest techniques and gives special attention to Japanese IC manufacturing techniques, showing how they obtain outstanding quality
 

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A very detailed and a must-have handbook for engineers in Semiconductor Industry.

Contents

CHAPTER 1 OVERVIEW OF SEMICONDUCTOR MANUFACTURING
1
CHAPTER 2 YIELD OPTIMIZATION
40
CHAPTER 3 METHODS OF SEMICONDUCTOR ANALYSIS
76
CHAPTER 4 CLEANROOM FACILITIES AND PROCEDURES
119
CHAPTER 5 WAFER CLEANING TECHNIQUES
161
CHAPTER 6 PHOTOLITHOGRAPHY AND ETCH PROCESSES
200
CHAPTER 7 THE DIFFUSION PROCESSES
252
CHAPTER 8 LOWPRESSURE CHEMICAL VAPOR DEPOSITION PROCESSES
302
CHAPTER 11 INTEGRATED CIRCUIT TESTING AND ANALYSIS
415
CHAPTER 12 STATISTICAL QUALITY CONTROL
464
CHAPTER 13 THE PEOPLE WHO MAKE THE CHIPS
499
CHAPTER 14 FUTURE TRENDS AND CONCLUSIONS531
527
HAZARDOUS CHEMICAL TOXICITY TABLE
549
EXPERIMENT DESIGN FOR PROCESS AND PRODUCT DEVELOPMENT
553
BIBLIOGRAPHY
565
INDEX
577

CHAPTER 9 ION IMPLANTATION PROCESSES
361
CHAPTER 10 METAL FILM DEPOSITION PROCESSES
387

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