Inertial MEMS: Principles and Practice

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Cambridge University Press, Feb 17, 2011 - Technology & Engineering
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A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.
 

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Contents

1 Introduction
1
2 Transducers
13
3 Noninertial forces
79
4 MEMS technologies
152
5 Firstlevel packaging
205
6 Electrical interfaces
227
7 Accelerometers
283
8 Gyroscopes
364
9 Test and calibration
460
Concluding remarks
466
Index
468
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About the author (2011)

Volker Kempe has more than 40 years of experience in research and development. He led the microelectronics engineering department at Austria Mikro Systems for over ten years. In 2003 he co-founded and became Vice President of SensorDynamics AG, and his current interests focus on the functionality, technology, and application of inertial MEMS.

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