Ion Plating Technology: Developments and ApplicationsIon plating is a hybrid vacuum coating process that combines the benefits of vacuum evaporation and sputtering. The term ion plating is generally applied to high energy plasma deposition methods in which the surface to be coated is subjected to a small flux of high energy ions and a much larger number of energetic neutrals before and during the deposition of the coating. |
Contents
Introduction | 1 |
Ion Plating System | 39 |
The Ion Plating Process | 67 |
Copyright | |
6 other sections not shown
Common terms and phrases
adhesion Ahmed alloy aluminium coating anode applications argon argon pressure Armour boat Bunshah cadmium carbon fibres chemical coating material coefficient of friction collisions contaminants corrosion protection current density dark space deposition rate diffusion discharge voltage effect electrical electron beam electron beam evaporation energetic energy distribution enhanced evaporation rate evaporation source film thickness gas pressure gases glow discharge gold heating high speed steel hollow cathode increase ion bombardment ion plated aluminium ion plated coatings ion plating process ion plating system lubricants Mattox McDonnell Douglas neutrals nitrogen oxide oxygen partial pressure particles Pirani gauge plasma plastic power supply properties pump reactive gas reactive ion plating region Reproduced by permission shown in Figure Spalvins sputter cleaning sputter deposition sputtering yield steel stress structure substrate bias substrate surface substrate temperature Teer thermal throwing power TiN coating titanium nitride titanium nitride coating triode uncoated vacuum chamber vacuum deposited vacuum evaporation zone