Issues in Nanotechnology and Micotechnology: Engineering, Fabrication, and Structural Research: 2011 Edition

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ScholarlyEditions, Jan 9, 2012 - Technology & Engineering - 233 pages
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Contents

Microelectromechanical Systems
UV Lithography and Molding Fabrication of Ultrathick Micrometallic Structures Using a KMPR Photoresist
A HighPower TemperatureStable Electrostatic RF MEMS Capacitive Switch Based on a Thermal BuckleBeam Design
A Parylene Bellows Electrochemical Actuator
Permanent Magnets for MEMS
A SiGlass BulkMicromachined Cryogenic Heat Exchanger for High Heat Loads Fabrication Test and Application Results
Wireless Signaling of Beta Detection Using Microdischarges
Microvalves for Natural Gas Analysis With Poly Ether Ether Ketone Membranes
Studies by JT Huang and coauthors describe new findings in micromechanics and microengineering
Studies from F Merola et al further understanding of micromechanics and microengineering
Studies in the area of micromechanics and microengineering reported from TM Kamel and coresearchers
Study results from G Mottet and colleagues in the area of micromechanics and microengineering published
Wireless implantable passive strain sensor design fabrication and characterization
On gas permeation in PDMS
Injection molded chips with integrated conducting polymer electrodes for electroporation of cells
Electrothermal bistability tuning in a large displacement micro actuator

An Electromagnetic Micro Power Generator for LowFrequency Environmental Vibrations Based on the Frequency Upconversion Technique
A Design Procedure for Wideband Micropower Generators
Design Fabrication and Characteristics of a MEMS Micromirror With Sidewall Electrodes
Micromechanics and Microengineering
Experimental verification of temperature coefficients of resistance for uniformly doped Ptype resistors in SOI
Microwave bonding of MWNTs and fabrication of a lowcost highperformance polymer pressure sensor
The microdroplet behavior of a molten leadfree solder in an inkjet printing process
Multiband radiofrequency filters fabricated using polyimidebased membrane transfer bonding technology
Copper electrodeposition in a throughsilicon via evaluated by rotating disc electrode techniques
A gasbagrollerassisted UV imprinting technique for fabrication of a microlens array on a PMMA substrate
A micromirror module using a MEMS digitaltoanalog converter and its application for optical surface profiling
Bonding strength of pressurized microchannels fabricated by polydimethylsiloxane and silicon
Miniature osmotic actuators for controlled maxillofacial distraction osteogenesis
An electrothermal microactuator with Zshaped beams
Lowvoltage droplet manipulation using liquid dielectrophoresis on electret
Monolithic integration of a micromachined piezoresistive flow sensor
Transient response and stability of the AGCPI closedloop controlled MEMS vibratory gyroscopes
Costeffective laser interference lithography using a 405 nm AlInGaN semiconductor laser
Reports outline micromechanics and microengineering research from CT Chen and colleagues
Research from A Wisitsoraat and coresearchers yields new findings on micromechanics and microengineering
Research from Hogskolen i Vestfold has provided new information about micromechanics and microengineering
A novel micro transportation system with fast movement of a micro container based on electrostatic actuation and a ratchet mechanism
Level set methods for the modelling of surface evolution in the abrasive jet micromachining of features used in MEMS and microfluidic devices
Electrostatically driven lowvoltage micromechanical RF switches using robust singlecrystal silicon actuators
Design fabrication and characterization of a frontetched micromachined thermopile for IR detection
Development of indium bumping technology through AZ9260 resist electroplating
Selfassembly and transfer of photoresist suspended over trenches for microbeam fabrication in MEMS
Fabrication of robust tooling for mass production of polymeric microfluidic devices
A MEMS rotary comb mechanism for harvesting the kinetic energy of planar vibrations
A molecular dynamics simulation approach for the squeezefilm damping of MEMS devices in the free molecular regime
Passive microassembly of modular hot embossed polymer microfluidic devices using exact constraint design
Design of piezoresistive versus piezoelectric contact mode scanning probes
Increasing pumping efficiency in a micro throttle pump by enhancing displacement amplification in an elastomeric substrate
Magnetic fieldassisted electrochemical discharge machining
Microfabricated ratchet structures for concentrating and patterning motile bacterial cells
PDMS biochips with integrated waveguides
Tuning of a superconducting microwave resonator at 77 K using an integrated micromachined silicon vertical actuator
Stretchable gold conductors embedded in PDMS and patterned by photolithography fabrication and electromechanical characterization
Micrometer glass nozzles for flow focusing
Distributed and lumped element models for a bimorphactuated micromirror
Design of experiment characterization of microneedle fabrication processes based on dry silicon etching
Inplane silicon probes for simultaneous neural recording and drug delivery
Grazing incidence broad ion beams for reducing lineedge roughness
Hydrophobicity of curved microstructured surfaces
Subhundred nanosecond electrostatic actuated RF MEMS switched capacitors
Fabrication of polyimide bistable diaphragms using oxide compressive stresses for the field of Buckle MEMS
Design and fabrication of a single membrane pushpull SPDT RF MEMS switch operated by electromagnetic actuation and electrostatic hold
MEMSbased Coulter counter for cell counting and sizing using multiple electrodes
Cantilever beam designs for RF MEMS switches
Xray fabrication of SAW resonators with narrow electrodes in thick highaspectratio polymer templates
Reduction of surface roughness for optical quality microfluidic devices in PMMA and COC
Sharpening of hollow silicon microneedles to reduce skin penetration force
Fabrication of superhydrophobic channels
A silicon microcavity selective emitter with smooth surfaces for thermophotovoltaic power generation
Design and fabrication of MEMScontrolled probes for studying the nanointerface under in situ TEM observation
Characterization of epitaxial PbZr TiO3 thin films deposited by pulsed laser deposition on silicon cantilevers
An in situ heater for a phasechangematerialbased actuation system
Portable audio electronics for impedancebased measurements in microfluidics
Two clovershaped piezoresistive silicon microphones for photo acoustic gas sensors
Tolerance analysis of a microoptical detection system for online monitoring of lubricant oils
A flexible tactile sensor based on a thermoelectric device for simultaneous detection of contact heat and contact force
Nanotechnology and Microtechnology
Photonics and Nanostructures
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