Laser Ablation

Front Cover
E. Fogarassy, D. Geohegan, M. Stuke
Newnes, Dec 2, 2012 - Science - 942 pages
0 Reviews
This book contains the proceedings of the largest conference ever held on this subject. The strong interest in this field is largely due to the fact that both fundamental aspects of laser-surface interaction as well as applied techniques for thin film generation and patterning were treated in detail by experts from around the world.
 

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Contents

Chapter 81 Modelling and diagnostic of pulsed laser cleaning of oxidized metallic surfaces
484
Chapter 82 Fast etching of sapphire by a visible range quasicw laser radiation
491
Chapter 83 CCl4assisted CF4 etching of silicon in a microwaveassisted LDE laser dry etchingprocess
496
Chapter 84 XeCl laser ablation of thin film ZnS
501
Chapter 85 Surface temperature measurements during pulsed laser action on metallic and ceramic materials
505
Chapter 86 Optimisation of laser wavelength in the ablation sampling of glass materials
513
Chapter 87 Ablation from metals induced by visible and UV laser irradiation
518
Chapter 88 Realtime determination of the amount of removed material during short pulses laser micromachining
522

Chapter 9 Calculations and experiments of material removal and kinetic energy during pulsed laser ablation of metals
61
Chapter 10 Measurement and calculation of the Fe2O3 ablation depth
66
Chapter 11 Calculation and measurement of the ultrasonic signals generated by ablating material with a Qswitched pulse laser
71
Chapter 12 2D modeling of laserinduced plume expansion near the plasma ignition threshold
76
Chapter 13 The influence of the electron structure of atoms shells on characteristics of optical breakdown in metal vapour
82
laser beam + laser plasma + target
89
Chapter 15 Modeling of laser induced plasma spectroscopic and time of flight experiments in pulsed laser deposition
97
Chapter 16 Spatial distribution of laserablated material by probing a plasma plume in three dimensions
102
Chapter 17 Electrostatic probe and optical spectroscopy studies of low temperature laser produced plasmas
112
Chapter 18 Study of the expansion of the laser ablation plume above a boron nitride target
117
Chapter 19 Plasma parameters in pulsed laserplasma deposition of thin films
122
Chapter 20 Preferential vaporization and plasma shielding during nanosecond laser ablation
126
combined imaging optical absorption and emission spectroscopy and ion probe measurements
131
Chapter 22 Electromagnetic diagnostics during pulsed laser deposition
139
Chapter 23 Fundamental characteristics of lasermaterial interactions ablation in noble gases at atmospheric pressure using inductively coupled plasma...
144
Chapter 24 Monitoring stress power during highpower pulsed lasermaterial interactions
149
Chapter 25 Simultaneous monitoring of ablative shocks in air by highspeed cineholography and multiplepass beam deflection probe
154
Chapter 26 Transport of neutral atoms monoxides and clusters in the plume produced by laser ablation of YBa2Cu3O7X in oxygen environment
159
Chapter 27 Temperature measurements during laser ablation of Si into He Ar and O2
164
Chapter 28 Spatially and temporally resolved emission intensities and number densities in low temperature laserinduced plasmas in vacuum and in a...
170
Chapter 29 Laser produced plasmas in high fluence ablation of metallic surfaces probed by timeofflight mass spectrometry
175
Chapter 30 Optical diagnostics of the lasertarget and laserplume interaction in pulsed laser ablation
181
Chapter 31 Timeofflight characterization of laser ablation plume from NbTe2 target in He atmosphere
186
Chapter 32 Investigation of vaporization and condensation processes of thin layers of CdHgTe from laser erosion plasma in Hg atmosphere
192
Chapter 33 Density and electron temperature of laser induced plasma a comparison of different investigation methods
195
Chapter 34 Laser plasma threshold of metals
199
Chapter 35 Comments on explosive mechanisms of laser sputtering
205
Chapter 36 Analysis of the expansion of hydroxyapatite laser ablation plumes
216
Chapter 37 Optical and particle properties of PLD vapourplasmas of ceramics
222
YAG laser ablation of metals
227
Chapter 39 Spectroscopic study of the microwave plasma enhanced pulsed laser deposition for Y1Ba2Cu3O7x superconducting thin films
233
Chapter 40 Soft laser sputtering of the GaAlAs 100 surface
238
Chapter 41 Dynamics of silicon plume generated by laser ablation and its chemical reaction
242
Chapter 42 Optical spectroscopy of emission from SiSiOx nanoclusters formed by laser ablation
251
Chapter 43 Magnetic field enhanced growth of carbon cluster ions in the laser ablation plume of graphite
261
Chapter 44 Formation of large carbon cluster ions at graphite HOPG surfaces by laser irradiation
267
Chapter 45 Particles synthesis in erosive laser plasma in a high pressure atmosphere
272
the transition from nonthermal processes to thermal evaporation
280
Chapter 47 Excimer laser induced surface modifications and matter interaction using doublepulsetechnique DPT
287
Chapter 48 Excimer laserinduced hydrodynamical effects and surface modifications on silicon carbide
296
Chapter 49 Excimer laser induced thermal evaporation and ablation of silicon carbide
302
Chapter 50 Increase of efficiency for the XeCl excimer laser ablation of ceramics
309
Chapter 51 The role of defects in laser induced positive ion emission from ionic crystals
316
NO desorption following excitation of the ππ band of the nitrate anion
321
Chapter 53 Laserinduced emission of neutral atoms and molecules from electronirradiated NaNO3
326
Chapter 54 Laser damage of CaF2 111 surfaces at 248 nm
332
Chapter 55 Laser patterning of thinfilm electrochemical gas sensors
341
Chapter 56 Multiwavelength irradiation effect in fused quartz ablation using vacuumultraviolet Raman laser
347
Chapter 57 Laser beam application to thin film transistors
352
Chapter 58 Laser induced nitridation of Ga on GaAs surfaces
359
Chapter 59 Lowfluence excimer laser irradiationinduced defect formation in indiumtin oxide films
363
Chapter 60 MicroRaman study of UV laser ablation of GaAs and Si substrates
370
Chapter 61 Single shot excimer laser annealing of amorphous silicon for AMLCD
376
Chapter 62 Liquid carbon observed with reflection measurements on CVDdiamond under UV pulsedlaser irradiation
384
Chapter 63 Erosion plume dynamics during pulsed laser alloying
387
Chapter 64 Excimer laser interaction with dielectric thin films
393
Chapter 65 Decomposition mechanisms of thin palladium acetate film with excimer UV radiation
399
Chapter 66 Single crystal laser patterning for selective YBa2Cu3O7 x growth
405
Chapter 67 Laser induced periodic surface structures on iron
410
geometric effects
415
Chapter 69 Optodynamics of laser ablation of graduation lines in chromium thin film on glass
420
Chapter 70 Excimer laser machining for the fabrication of analogous microstructures
425
Chapter 71 Femtosecondpulse visible laser processing of transparent materials
430
Chapter 72 Picosecond UVlaser ablation of Au and Ni films
439
Chapter 73 Xray generation for medical applications from a laserproduced plasma
443
Chapter 74 Photoninduced dry etching of Si100 in the VUV
448
Chapter 75 The role of gasphase in the laser etching of Cu by CCl4
453
Chapter 76 Laserinduced formation of visible light emitting silicon
457
Chapter 77 Cleaning of optical surfaces by excimer laser radiation
463
Chapter 78 In situ surface cleaning of pure and implanted tungsten photocathodes by pulsed laser irradiation
469
Chapter 79 Laser cleaning in art restoration
474
Chapter 80 Cleaning of copper traces on circuit boards with excimer laser radiation
479
YAG ablation damage in Si100 wafers
528
Chapter 90 Industrial excimer laser beam properties
532
Chapter 91 Excimer laser ablation of polymers and glasses for grating fabrication
537
Chapter 92 Chemical surface modification of fluorocarbon polymers by excimer laser processing
550
Chapter 93 Excimer laserinduced surface modifications of biocompatible polymer blends
558
Chapter 94 VUV ablation of polymers by emission from gaspuff Zpinch plasmas
563
Chapter 95 Laser implantation of fluorescent molecules into polymer films
569
Chapter 96 Surface chemical reaction of polymer film with reactive intermediates produced by laser ablation of azido compound
572
Chapter 97 Excited state relaxation processes of MALDImatrices studied by luminescence spectroscopy
577
Chapter 98 Mapping of molecular C17 indandione13 pyridinium betaine adsorbates on fused silica by surface second harmonic generation
581
Chapter 99 Etching and functionalization of a fluorocarbon polymer by UV laser treatment
586
YAG laser induced microexplosions in dentin
591
Chapter 101 Excimer laser ablation of low and high absorption index polymers
596
Chapter 102 Single pulse threshold and transmission behaviour of a triazenopolymer during pulsed UVlaser irradiation
601
Chapter 103 High sensitivity quadrupole mass spectrometry of neutrals sputtered by UVlaser ablation of polymers
605
Chapter 104 Formation of the surface structure of polyethyleneterephtalate PET due to ArF excimer laser ablation
611
Chapter 105 Pulsed laser ablation and deposition of fluorocarbon polymers
617
Chapter 106 Deposition of fluoropolymer thin films containing semiconductor microcrystallites by VUV laser ablation
621
Chapter 107 Electrical and optical characteristics of organic thin films fabricated by laser ablation
625
Chapter 108 Thin film growth by the pulsed laser assisted deposition technique
630
Chapter 109 Scaleup of pulsed laser deposition PLD for 4wafer coating
643
Chapter 110 Ultrathin film deposition by pulsed laser ablation using crossed beams
649
Chapter 111 Offaxis excimer laser deposition of Ta2O5 thin films
656
Chapter 112 Selection of kinetic energy of laser ablated particles
659
Chapter 113 Aspects of particulate production from metals exposed to pulsed laser radiation
663
Chapter 114 Classification of particulates on pulsedlaser deposited YBaCuO films
668
Chapter 115 Formation of artificiallylayered hightemperature superconductors using pulsedlaser deposition
672
Chapter 116 Stoichiometric transfer of complex oxides by pulsed laser deposition
679
Chapter 117 Improved properties of Pulsed Laser Deposited YBaCuO on NdGaO3 using CeO2 template layers
685
Chapter 118 Giant laserinduced voltages at room temperature in Pr doped YBaCuO thin films
689
Chapter 119 The importance of gas scattering processes on the stoichiometry deviations of laser deposited films
693
study of the oxygen incorporation by 18O isotopic tracing techniques
697
Chapter 121 Critical thickness of YBaCuO 123 strained thin films and superlattices grown by pulsed laser deposition
703
Chapter 122 Laser deposition of YBa2Cu3O7 films on MgO100 at 100 mm targetsubstrate distance and oxygen pressures below 01 mbar
708
Chapter 123 Anisotropic resistivity in pulsedlaser deposited Bi2Sr2CaCu2O8 +δ films
713
Chapter 124 Substrate size effect at offaxis laser deposition of multicomponent films
717
Chapter 125 Insitu reflectivity measurements during pulsedlaser deposition of Bi2Sr2CaCu2O8 +δ
721
Chapter 126 Ionassisted pulsedlaser deposition for the fabrication of YBaCuO multilayer structures using oriented intermediate layers of YSZ and Ce...
726
Chapter 127 Synthesis of REBaSrCuO by pulsedlaser deposition
731
Chapter 128 Mirrorsmooth YBa2Cu3O7 x superconducting films deposited by plasmaenhanced pulsed laser deposition technique
735
Chapter 129 Reactive laser deposition of high quality YBaCuO and ErBaCuO films
739
Chapter 130 Growth structuring and characterisation of alloxide thin film devices prepared by pulsed laser deposition
744
Chapter 131 Deposition of optical coatings by pulsed laser ablation
752
Chapter 132 Rareearth doped glass waveguides prepared by pulsed laser deposition
760
Chapter 133 Preparation of SiOxNy films by reactive KrF laser ablation
764
Chapter 134 Kinetic energy distributions of ions ejected during laser ablation of lead zirconate titanate and their correlation to deposition of ferroelec...
769
Chapter 135 Epitaxial ferroelectric PZT and BST thin films by pulsed UV laser deposition
775
Chapter 136 Growth and characterization of PLZT films
779
Chapter 137 Electrical characterization of semiconducting La doped SrTiO3 thin films prepared by pulsed laser deposition
784
Chapter 138 Pulsed laser deposition of sillenite films intended for photorefractive damage free waveguides
791
Ce09Gd01O195 La07Sr03CoOy and La07Sr03Co02Fe08Oy
795
Chapter 140 Ferrimagnetic thin films prepared by pulsed laser deposition
802
Chapter 141 Pulsed laser deposition of high quality ITO thin films
807
Chapter 142 Pulsedlaser deposited ZnO for device applications
811
Chapter 143 Excimer laser ablating preparation of Ba2NaNb5O15 thin films on KTiOPO4 substrate and its guide wave property
819
Chapter 144 Pb1xCaxTiO3 thin films prepared by laser ablation of ceramic targets
823
Chapter 145 Characterization of ZnO thin films deposited by laser ablation in reactive atmosphere
827
Chapter 146 An experimental study and modeling of the thickness distribution in pulsed laser deposited ferroelectric thin films
831
Chapter 147 Preparation of TiO2 thin films by pulsed laser deposition for waveguiding applications
836
Chapter 148 Pulsed laser deposition of electroceramic thin films
842
sapphire
849
Chapter 150 Pulsed laser deposition of nasicon thin films
855
Chapter 151 Comparative diagnostics of ArF and KrFlaser generated carbon plumes used for amorphous diamondlike carbon film deposition
859
Chapter 152 Laser reactive ablation deposition of silicon carbide films
866
Chapter 153Carbon nitride thin films obtained by laser ablation of graphite in a nitrogen plasma
870
Chapter 154 Structural and optical characteristics of pulsed laser deposited ZnSe epilayers
874
Chapter 155 Deposition of HgCdTe epitaxial layers on anisotropically etched silicon surfaces by laser evaporation
881
Chapter 156 Pulsed Laser Deposition of permanent magnetic Nd2Fe14B thin films
887
Author index
891
Subject index
902
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