Life-Cycle Assessment of Semiconductors
Life-Cycle Assessment of Semiconductors presents the first and thus far only available transparent and complete life cycle assessment of semiconductor devices. A lack of reliable semiconductor LCA data has been a major challenge to evaluation of the potential environmental benefits of information technologies (IT). The analysis and results presented in this book will allow a higher degree of confidence and certainty in decisions concerning the use of IT in efforts to reduce climate change and other environmental effects. Coverage includes but is not limited to semiconductor manufacturing trends by product type and geography, unique coverage of life-cycle assessment, with a focus on uncertainty and sensitivity analysis of energy and global warming missions for CMOS logic devices, life cycle assessment of flash memory and life cycle assessment of DRAM. The information and conclusions discussed here will be highly relevant and useful to individuals and institutions.
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Chapter 2 Semiconductor LCI Methods
Chapter 3 Semiconductor Manufacturing Trends in Product Type and Geography
Chapter 4 LifeCycle Energy and Global Warming Emissions of CMOS Logic
Chapter 5 LifeCycle Assessment of CMOS Logic
Chapter 6 LifeCycle Assessment of Flash Memory
Chapter 7 LifeCycle Assessment of Dynamic Random Access Memory
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0.00EC00 Other chemicals 45 nm node 90 nm node air kg/wafer Expected AsH3 BCl3 benzotriazole BTBAS CHF3 chip CMOS logic CMOS Manufacturing emissions CMOS manufacturing inventory COF2 cycle impacts device ecotoxicity ECP additive EIO-LCA electricity electronics emissions per wafer Emissions to air energy consumption environmental impacts equipment ethyl lactate eutrophication Expected value Low facility Flash memory manufacturing formaldehyde g/wafer Inputs g/wafer GeH4 global warming potential Hazardous F2 HCl gas HMDS human health impacts HVAC impact factors impacts per wafer Inputs g/wafer Inputs inventory per wafer kg/wafer Expected value LCI data Life-Cycle Assessment life-cycle energy life-cycle impacts life-cycle stage n-methyl-2-pyrollidone nm Emissions nm Inputs g/wafer nm node OMCTS p-cresol PDMAT PGME phase polyamide power consumption semiconductor manufacturing semiconductor products SiF4 silicon Springer Science+Business Media surfactants Table TDEAH TDMAS TDMAT technology node nm TEOS TMAH transistors value Low High wafer fabrication