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Polarizing metal stripe gratings for a microoptical polarimeter 518302
Fabrication of serfassembled photoniccrystal structures by centrifugation and spin
Structural parameter of color separating grating and its physical characteristics 518304
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5183 Lithographic angle antireflection applications array atomic force atomic force microscope axis beam splitter birefringence calculated calibration cantilever coated coding gray-tone mask coupling CSG's devices diamond machining diamond tools diamond turning diffraction efficiency diffractive optical elements e-beam edited by E.-B electron etching exposure depth exposure dose fiber filter Fourier frequency Fresnel lens function glass grating period gray tone lithography grayscale height illumination imaging incidence intensity distribution interferometer Kley laser layer lens lenses Lithographic and Micromachining manufacturing mask aligner material measurement method micro-interferometer micro-optical microlenses Micromachining Techniques microscope mold nanometers opal Optical Component Fabrication parameters pattern phase mask photolithography photonic crystals photoresist polarization polyimide polymer Proc produce pyramid prism radius reflection refractive index replication resist profile resonance sample shown in Figure silicon SPIE SPlE Vol stair structures substrate surface profile taper thickness tool transmission wafer wave waveguide wavelength width