Low Dielectric Constant Materials for IC Applications

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Springer Science & Business Media, 2003 - Science - 309 pages
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Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for
 

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Contents

Overview on Low Dielectric Constant Materials
1
References
19
References
68
Structure and Property Characterization
75
Vapor Deposition of Lowfc Polymeric Dielectrics
95
PlasmaEnhanced Chemical Vapor Deposition
121
References
163
References
198
References
219
References
248
References
275
Integration of SiLK Semiconductor Dielectric
277
References
303
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