MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications

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CRC Press, Apr 8, 2008 - Technology & Engineering - 432 pages
2 Reviews
The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis and treatment of disease, and many more applications.

MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications presents the latest performance parameters and experimental data of state-of-the-art sensors and devices. It describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. Some of the cutting-edge materials covered include quantum dots, nanoparticles, photonic crystals, and carbon nanotubes (CNTs).

This comprehensive work encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, photonic bandgap devices, acoustic sensors, CNT-based transistors, photovoltaic cells, and smart sensors. It also discusses how these sensors and devices are used in a number of applications, including weapons’ health, battlefield monitoring, cancer research, stealth technology, chemical detection, and drug delivery.

 

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Contents

Chapter 1 Highlights and Chronological Developmental History of MEMS Devices Involving Nanotechnology
1
Chapter 2 Potential Actuation Mechanisms Their Performance Capabilities and Applications
38
Chapter 3 Latest and Unique Methods for Actuation
93
Chapter 4 Packaging Processing and Material Requirements for MEMS Devices
136
Chapter 5 RFMEMS Switches Operating at Microwave and mmWave Frequencies
166
Chapter 6 RFMicrowave MEMS Phase Shifter
211
Chapter 7 Applications of Micropumps and Microfluidics
255
Chapter 8 Miscellaneous MEMS Nanotechnology Devices and Sensors for Commercial and Military Applications
287
Chapter 9 Materials for MEMS and NanotechnologyBased Sensors and Devices
334
Index
363
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Jha-JHA Technical Consulting Services, Cerritos, CA

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