MEMS Materials and Processes Handbook

Front Cover
Reza Ghodssi, Pinyen Lin
Springer Science & Business Media, Mar 18, 2011 - Technology & Engineering - 1188 pages

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

 

What people are saying - Write a review

We haven't found any reviews in the usual places.

Contents

1 The MEMS Design Process
1
2 Additive Processes for Semiconductors and Dielectric Materials
37
3 Additive Processes for Metals
137
4 Additive Processes for Polymeric Materials
193
Piezoelectric MEMS
272
6 Materials and Processes in Shape Memory Alloy
355
7 Dry Etching for Micromachining Applications
403
8 MEMS WetEtch Processes and Procedures
457
9 MEMS Lithography and Micromachining Techniques
666
10 Doping Processes for MEMS
755
11 Wafer Bonding
816
12 MEMS Packaging Materials
879
13 Surface Treatment and Planarization
924
14 MEMS Process Integration
1045
Index
1183
Copyright

Other editions - View all

Common terms and phrases

Bibliographic information