Micro (MEMS) and nanotechnologies for space applications: 19-20 April, 2006, Kissimmee, Florida, USA
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Integration of MEMS phase shifters with CMOS control circuitry 622303
Diffractive optics for Moon topography mapping 622304
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acetone acoustic wave actuation current adaptive optics AlN thin film analysis analytes antibody AW devices Bacillus Bacillus anthracis beam structures bending response biological biosensors cantilever carbide carbon chemical circuit coated components conducting polymer deflection deposition detection detector diameter diffraction Dip Pen Nanolithography DMMP DPN probe arrays elastic modulus electroactive electroactive polymer electron element etching fabrication Fe-B flagellar filament flagellar motors frequency shift function immobilization laser layer LCORR length load LOLA magnetic magnetostrictive mass materials measured membrane Micro MEMS micro-wells microcantilever microfabricated microfluidic molecules MSMC nanobars nanopore Nanotechnologies optical pattern performance phage phase shifter piezoelectric pore protein Q value resonance frequency rotation Row/Col sample scanning probe sensitivity sensor platform shown in Figure shows silicon nitride solution SPIE spores sputtering substrate surface techniques Technology temperature testing thermal thickness transducer TT Sel uHYBAS vapor voltage wafer width