Micromachining of elements with optical and other submicrometer dimensional and surface specifications: 2-3 April, 1987, The Hague, The Netherlands
SPIE--the International Society for Optical Engineering, 1987 - Technology & Engineering - 159 pages
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PL04 High power pulsed gas lasers W J Witteman Univ of Twente Netherlands
ACCURACY LIMITS OF ULTRAPRECISION MACHINES
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803 Micromachining accuracy aerostatic air bearing Alexandrite amplitude angle AW space axis cantilever chip clearance components cutting tool density depth of cut devices diameter diamond tool diamond-machined diffraction diffraction patterns ductile effects electron Elements with Optical energy errors fabrication facet feed rate flat frequency geometry germanium grain grid grinding wheel high precision hydrostatic infeed instrument interferogram Journal Bearings laser lathe LIGA technique limit machine tool manufacture material measured mechanical metal Micromachining of Elements micrometer Microns microstructures modulation Netherlands operation optical surfaces orifice output parameters performance plane plotted precision machining pressure produced radiation radius range reflectivity reflector rotation sample scan scattered sensor shown in Figure shows silicon simulation speed SPIE Vol spindle stiffness structure stylus substrate surface finish surface profile surface quality surface roughness synchrotron radiation table motion systems thermal ultraprecision machines variation velocity vertical vibration wafer waveguide wavelength workpiece