Micromechanics and MEMS: Classic and Seminal Papers to 1990
Wiley, Jan 29, 1997 - Technology & Engineering - 701 pages
Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.
What people are saying - Write a review
We haven't found any reviews in the usual places.
Acknowledgments and Dedication
Early Papers in Micromechanics 1
Side Drive Actuators
16 other sections not shown
actuator alignment applied beam bearing bonding calculated cantilever charge chip circuit constant deflection dependence deposited described determined developed devices diaphragm direction displacement drive effect electric electrode electrostatic element etching example fabrication fiber field Figure film flow force frequency friction function geometry given glass IEEE increase integrated layer length linear lithography magnetic material measured mechanical membrane metal method micro micromachining micromotor motion motor move obtained operation oxide pattern performance planes plate polysilicon position possible potential presented pressure problem produced properties ratio Research resistance resonant robot rotation rotor scale sensor shown in Fig shows side silicon stator step stress structure substrate surface techniques temperature thermal thickness thin tion torque typical valve voltage wafer wire