Nano- and micro-metrology: 16-17 June, 2005, Munich, Germany

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SPIE, 2005 - Technology & Engineering - 362 pages
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Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

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Conference Committee
Realtime in situ sag characterization of microlenses fabricated with Deep Lithography with
Interferometric method for measuring the refractive index profile of optical waveguides

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