Nano- and micro-metrology: 16-17 June, 2005, Munich, Germany
SPIE, 2005 - Technology & Engineering - 362 pages
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
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Realtime in situ sag characterization of microlenses fabricated with Deep Lithography with
Interferometric method for measuring the refractive index profile of optical waveguides
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algorithm amplitude analysis angle aperture application beam splitter calculated calibration camera characterization coherence components configuration confocal microscopy detection detector diameter Diederik diffraction digital holography displacement distribution edited by Heidi ellipsometry error experimental femtosecond fibre filter focal length function Heidi Ottevaere illumination index profile instrument intensity interface interference interferogram laser layer LCSI lens light source linear Mach-Zehnder interferometer measurement method metrology Micro-Metrology micro-optics microlens microscope mirror mode modulation near-field noise object obtained Optical Coherence Tomography optical fiber parameters pattern Peter DeWolf phase map phase shift pixels plane polarization position probe Proceedings of SPIE ratio RCWA reflection refractive index resolution rotation sagittal sample scanning scatterometry sensor setup shearing interferometer shown in Figure signal simulation spatial frequency speckle spectral SPIE Vol Stokes vector structure substrate surface tangential technique topography uncertainty values wave wave plate waveguide wavelength