Optical Measurement of Surface Topography

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Richard Leach
Springer Science & Business Media, Mar 31, 2011 - Technology & Engineering - 323 pages
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The measurement and characterisation of surface topography is crucial to modern manufacturing industry. The control of areal surface structure allows a manufacturer to radically alter the functionality of a part. Examples include structuring to effect fluidics, optics, tribology, aerodynamics and biology. To control such manufacturing methods requires measurement strategies. There is now a large range of new optical techniques on the market, or being developed in academia, that can measure areal surface topography. Each method has its strong points and limitations. The book starts with introductory chapters on optical instruments, their common language, generic features and limitations, and their calibration. Each type of modern optical instrument is described (in a common format) by an expert in the field. The book is intended for both industrial and academic scientists and engineers, and will be useful for undergraduate and postgraduate studies.

 

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Contents

Introduction to Surface Texture Measurement
1
Some Common Terms and Definitions
15
Limitations of Optical 3D Sensors
23
Calibration of Optical Surface Topography Measuring Instruments
49
Chromatic Confocal Microscopy
71
Point Autofocus Instruments
107
Focus Variation Instruments
130
Phase Shifting Interferometry
167
Coherence Scanning Interferometry
187
Digital Holographic Microscopy
209
Imaging Confocal Microscopy
237
Light Scattering Methods
287
Index
319
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About the author (2011)

Professor Richard Leach works at National Physical Laboratory,Teddington, UK, since 1990. He is a visiting Professor of the Wolfson School for Mechanical and Manufacturing Engineering, Loughborough University. His current position is Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovation Division. He is the lead scientist on three DIUS National Measurement System Engineering Measurement Programme projects: areal surface texture and structured surfaces metrology, development of low force transfer artefacts and probes for micro-coordinate measuring machines. He is also lead scientist on projects funded by DIUS Measurement for Innovators (MfI), EPSRC and EU. Professor Leach is the Measurement Service Manager for the Engineering Nanometrology Measurement Service at NPL.

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