Optical micro- and nanometrology in manufacturing technology: 29-30 April, 2004, Strasbourg, France
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
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Application of the vortex transform to microscopic interferometry 545802
Interferometric methods for static and dynamic characterizations of micromembranes
MOEMS DEVICES AND MATERIALS CHARACTERIZATION
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ablation actuation algorithm amplitude analysis angle aperture applied Asundi axis beam calculated camera characterization Christophe Gorecki curve deformation detection determined device diffraction digital holography displacement distribution error experimental fiber field Figure film Fourier transform fringe pattern function grid gyroscope height holographic illumination InGaN integrated intensity interference interferogram interferometry laser layer lens light linear Makyoh image measurement mechanical membrane MEMS method microlens micromachined micromembranes microscope mirror mode mode shapes modulation MOEMS MQWs nanometers Nanometrology in Manufacturing nanoparticles near-field optical numerical obtained optical fiber Optical Micro parameters particle phase shifting phase step pixel plane polarization probe reflection refractive index resolution resonance frequency sample scanning sensor shape shown shows signal silicon simulation spatial speckle speckle interferometry SPIE Vol stroboscopic structure surface surface plasmon resonance technique Technology thickness topography Twyman-Green interferometer V-groove VCSEL vibration Vortex Transform wafer wave wavelength