Optical micro- and nanometrology in manufacturing technology: 29-30 April, 2004, Strasbourg, France

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SPIE, 2004 - Technology & Engineering - 300 pages
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Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

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Contents

Application of the vortex transform to microscopic interferometry 545802
9
Interferometric methods for static and dynamic characterizations of micromembranes
16
MOEMS DEVICES AND MATERIALS CHARACTERIZATION
34
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