Precision instrument design: 1-3 November 1988, Santa Clara, California
SPIE, 1989 - Technology & Engineering - 157 pages
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P R Yoder Jr T F Macri W B Telfair P S Bennett C A Martin J W Warner Taunton
A/D converter accelerometer accuracy air bearing algorithm alignment camera alignment system aperture aperture stop arcsecond array axial baseline beam boresight BSDF calibration centroid collimator components cornea corneal topography detection detector diameter drift edge ellipsogram ellipsometric entrance pupil field of view filter flexure focal plane focus force frequency fringes function gauge hologram interferometer illumination image stacking input inspection intensity interferometer keratoscope kinematic transmission laser lateral movement LED image lens light-section linear located machine maximum measurement mechanical microns microscope minimum mirror motor mounted nanometers operation optical axis optical density optical system output parameters periscope pixel plate platten polychromator polygon position PRECISION INSTRUMENT pupil pupil image range reference resolution retroreflector rotation sample scan line sensors Shack-Hartmann shown in Figure signal slit slot spot surface Taunton Technologies telescope temperature thermal throughput translation stage values variations voice coil wafer wavelength width