Proceedings of the AVS Symposium on Ion Implantation--New Prospects from Materials Modification, 14 June 1978, T. J. Watson Research Center, Yorktown Heights, New York

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Published for the American Vacuum Society by the American Institute of Physics, 1978 - Science - 57 pages
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Contents

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1686
Optical spectroscopy for diagnostics and pro J E Greene
1718
Plasma stream transport method 2 Use of Takachi Tsuchimoto
1730

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