Actes de la 8ème Conférence Européenne Sur Les Dépôts Chimiques en Phase Gazeuse

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Michael L. Hitchman, Nicolas J. Archer
Ed. de physique, Jan 1, 1991 - Chemical vapor deposition - 984 pages
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Contents

FUNDAMENTALS
xiv
W LI B Z GUO S H LIN and H MA Angular distribution
J de LEGE and M HENDRIKS Characterization and optimiza
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