Scanning Electron Microscopy: Physics of Image Formation and Microanalysis

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Springer Science & Business Media, Sep 17, 1998 - Science - 527 pages
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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
 

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Contents

II
1
III
3
IV
7
V
11
VI
13
VII
21
VIII
38
IX
46
XXIX
253
XXXI
273
XXXII
289
XXXIV
299
XXXV
308
XXXVI
312
XXXVII
314
XXXVIII
316

X
57
XII
73
XIII
82
XIV
98
XV
117
XVI
135
XVIII
152
XIX
171
XXI
177
XXII
183
XXIII
197
XXIV
207
XXVI
222
XXVII
234
XXVIII
237
XXXIX
324
XL
328
XLI
329
XLIII
359
XLIV
368
XLV
374
XLVI
379
XLVII
380
XLVIII
396
XLIX
407
L
436
LI
441
LII
449
LIII
515
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About the author (1998)

Reimer, University of Munster, Germany.

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