Semiconductor Safety Handbook: Safety and Health in the Semiconductor Industry
Interwoven within our semiconductor technology development had been the development of technologies aimed at identifying, evaluating and mitigating the environmental, health and safety (EH&S) risks and exposures associated with the manufacturing and packaging of integrated circuits. Driving and advancing these technologies have been international efforts by SEMI's Safety Division, the Semiconductor Safety Association (SSA), and the Semiconductor Industry Association (SIA).
The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH&S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH&S in the semiconductor industry. This text had taken three years to complete and has involved tremendous effort and commitment by the authors.
They have attempted to construct a reference manual that is comprehensive in its coverage of the technical aspects of each individual subject, while at the same time addressing practical applications of each topic. The scope of this text, from its inception, was intended to address significantly more than what would typically be classified under the definition of ""safety."" However, all of the chapters have a direct application to the protection and preservation of semiconductor employees, the surrounding communities and the environment.
This book is a hands-on reference to environmental, health and safety issues critical to the semiconductor industry. It was also the author's intent to produce a text that provides a practical user's guide for semiconductor environmental, health and safety practitioners as well as those individuals responsible for operation, maintenance and production in wafer fabrication facilities.
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Chapter 3 Chemical Hazards in Semiconductor Operations
Chapter 4 Industrial Hygiene
Chapter 5 Electrical Hazards
Chapter 6 Radiation Safety
Chapter 7 Recognition Evaluation and Control of Some Plasma Processing Hazards
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ACGIH acid alarm arsine assessment building CGA Connection Chemical Formula clean cleanroom Code combustible compliance concentration contained corrosive Critical cylinder valve density designed diborane dopant DOT classification DOT label duct emergency employees environment environmental audit etching evaluation exhaust Exposure limits facility fire flammable flow gas cabinet gas cylinder gas detection gas detectors gases gloves hazardous materials hazardous waste HEPA hydrogen installed ion implanters Latent heat leak liquid maintenance metal Molar specific heat NFPA Occupational operations organization OSHA oxidizers panel personnel phosphine plasma plasma etching potential pressure procedures pump pyrophoric regulations Relative density response risk Safety and Health sample semiconductor fabrication semiconductor industry semiconductor manufacturing silane solvents Specific heat ratio standards storage target gas Technology temperature testing tion toxic gas monitoring vapor ventilation wafer workers Yes No N/A