Sputtering by Particle Bombardment: Sputtering of alloys and compounds, electron and neutron sputtering, surface topography

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Springer-Verlag, Dec 31, 1983 - Science - 391 pages
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Contents

Introduction and Overview By R Behrisch
1
Sputtering of Multicomponent Materials
11
Chemical Sputtering By J Roth With 30 Figures
91
Copyright

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