Study of submicron periodic structures in GaAs-GaAlAs double herterostructures [i.e. heterostructures]: fabrication and distributed-feedback injection lasers

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Cornell University, 1979 - Technology & Engineering - 246 pages
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Contents

GRATINGS FABRICATED BY SCANNING ELECTRON
5
HOLOGRAPHIC PHOTORESIST GRATINGS
19
LIQUID PHASE EPITAXIAL GROWTH
42

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