Vacuum Engineering Calculations, Formulas, and Solved Exercises

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Academic Press, Dec 2, 2012 - Science - 257 pages
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This book was written with two main objectives in mind—to summarize and organize the vast material of vacuum technology in sets of useful formulas, and to provide a collection of worked out exercises showing how to use these formulas for solving technological problems. It is an ideal reference source for those with little time to devote to a full mathematical treatment of the many problems issued in vacuum practice, but who have a working knowledge of the essentials of vacuum technology, elementary physics, and mathematics. This time saving book employs a problem-solving approach throughout, providing the methodology for computing vacuum parameters. References and solved exercises are appended to the end of each chapter.

Key Features
* Presents the thermal transpiration effect in vacuum gauges with application to capacitance manometers in vacuum metrology
* Covers analytical-statistical calculation of conductances of vacuum elements
* Examines the molecular flow of gas through short pipes and channels
* Explains chocked and nonchocked laminar flow of gas through vacuum elements
 

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Contents

Chapter 1 Ideal Gases
1
Chapter 2 Real Gases
29
Chapter 3 Kinetic Theory of Gases
35
Chapter 4 Gas Flow in Components and Vacuum Systems
76
Chapter 5 Steady Flow of Gas in the Viscous Range
104
Chapter 6 Steady Flow of Gas in the Molecular Range
127
Chapter 7 Steady Flow of Gas in the Transition Range
171
Chapter 8 Gas Load
176
Chapter 9 Vacuum Pumps
202
Chapter 10 Pumpdown Transient
211
Chapter 11 Pumping Steady State
235
System of Units Physical Constants Conversion Factors and Relation among Temperature Scales
239
Index
249
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