Thick Film Sensors
Elsevier, 1994 - Technology & Engineering - 471 pages
The vast expansion of the sensor and actuator field in recent years has necessitated the creation of a handbook series to clarify scientific developments.
First in the new series, Handbook of Sensors and Actuators, which will examine a broad range of topics across the discipline, this volume explores thick-film technology. The area has already achieved a high rank in the families of advanced solid sensor technologies but there has been limited acknowledgement of its future potential. This publication aims to increase the involvement of internationally recognised sensor experts by suggesting possible directions for further investigation. In this pursuit, it disseminates the data identifying the actual performances and applications of thick-film sensors manufactured all over the world and presents ideas underlying current activities in the research and development of new devices.
Three major areas are explored in which thick film technology contributes as a sensor technology, namely: hybrid circuits for signal processing (in combination with either thick-film sensing elements or transducing elements derived from other technologies), creation of architectural structures (eg. multilayer structures, integrated chips with chemical sensing elements, sensor arrays) and transducing elements derived from thick-film pastes. However, the unique properties and chances offered by thick-film technology for sensor manufacture might not be appreciated without emphasis on both scientific and technological features which are either common or distinguished from those of the major alternative technologies, namely silicon, thin films and ceramic. These are therefore also considered, enabling the volume to offer a balanced view of the state-of-the-art in this exciting field.
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THICK FILM TECHNOLOGY
THICK FILM MATERIALS AND STRUCTURES
Substrates for thickfilm technology
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