Proceedings of the Eleventh International Symposium on Plasma Processing

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The Electrochemical Society, 1996 - Medical - 720 pages
 

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Page 176 - R. Braunstein, AR Moore, and F. Herman. Phys. Rev. 109, 695, 1958.
Page 688 - Department of Electrical and Computer Engineering Carnegie Mellon University...
Page 357 - Division of Chemistry and Chemical Engineering, California Institute of Technology, Pasadena, CA...
Page 404 - This work, performed at Sandia National Laboratories, was supported by the US Department of Energy under contract number DE-AC04-76DP007. The modeling and analysis of the complex thermal component were done by Jackie H. Chen, whose contribution to this paper is much appreciated. References 1 Computervision Corporation, "CADDS4,
Page 75 - TwoDimensional Direct Simulation Monte Carlo (DSMC) of Reactive Neutral and Ion Flow in a High Density Plasma Reactor,
Page 521 - A. Yuuki, M. Yamamuka, T. Makita, T. Horikawa. T. Shibano, N. Hirano, H. Maeda, N. Mikami, K. Ono, H. Ogata and H. Abe: '95 IEEE IEDM Technical Dig.
Page 136 - Ministry of Education, Science and Culture, and by a grant from the Murata Science Foundation.
Page 521 - S. Aya, H. Yabe, K. Itoga, T. Hifumi, K. Marumoto, T. Kuroiwa, T. Kawahara, K. Nishikawa, T. Oomori, T. Fujino, S. Yamamoto, S. Uzawa, M. Kimata, M. Nunoshita and H. Abe, "Gigabit scale DRAM cell with new simple Ru/(Ba, Sr)TiC>3 stacked capacitor using X-ray Lithography", IEEE Int.
Page 162 - Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA 16802...
Page 49 - Fang, and James P. McVittie Center for Integrated Systems, Stanford University, Stanford, CA 94305-4070...

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