Introduction to Microelectromechanical Systems Engineering

Front Cover
Artech House, 2004 - Technology & Engineering - 283 pages
3 Reviews
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.
 

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Contents

A Technology from Lilliput
1
To MEMS or Not To MEMS?
7
Summary
11
Materials for MEMS 1
13
Important Material Properties and Physical Effects
24
Processes for Micromachining
33
Advanced Process Tools
55
Nonlithographic Microfabrication Technologies
63
Summary
165
DNA Analysis
172
Microelectrode Arrays
182
MEM Structures and Systems in RF Applications
189
Microelectromechanical Resonators
200
Microelectromechanical Switches
211
Packaging and Reliability Considerations for MEMS 21 7
217
DieAttach Processes
225

Summary
74
MEM Structures and Systems in Industrial and Automotive Applications
79
Passive Micromachined Mechanical Structures
85
Actuators and Actuated Microsystems
116
Summary
128
FiberOptic Communication Devices
141
Types of Packaging Solutions
233
Quality Control Reliability and Failure Analysis
243
Summary
256
About the Authors
271
Copyright

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Microsystem Design
Stephen D. Senturia
No preview available - 2005
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About the author (2004)

Nadim Maluf is vice president of New Focus, Inc. and a consulting professor of electrical engineering at Standford University. A best-selling author in the area of MEMS technology, Dr. Maluf earned his Ph.D. in electrical engineering at Standford University.

Kirt Williams is a MEMS consultant based in California's Silicon Valley. Formerly, he was a member of the technical staff at Agilent Technologies. He received his Ph.D. and M.S. in electrical engineering from the University of California at Berkeley.

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