Modern Vacuum Practice
Modern Vacuum Practice is an easy-to-understand introduction to high vacuum technology suitable for anyone using high vacuum as a tool. The author provides a fundamentally non-mathematical treatment of the subject, assuming little or no prior vacuum knowledge throughout. With its emphasis always on providing practical information, the book gives the reader the knowledge to set up, use, maintain and troubleshoot a vacuum system.
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Oilsealed mechanical rotary pumps
Some relevant physical concepts
13 other sections not shown
allow applications atmospheric pressure atoms backing ballast become calibration cause chamber chemical cleaning closed cold components compression conductance connected contamination cooling cryopump depends diffusion pump effect electrical electrons example exhaust Figure flange flow fluid gases gauge head give glass heat helium high vacuum increase indicated industry inlet ionization known leak limited liquid load lower magnetic manufacturers mass material mbar mean measurement mercury metal method molecular molecules nitrogen normally Note obtained occur operation outgassing particles particularly path positive possible prevent problem produce pumping speed range reading reduced removed result rotary pump rotor roughing running seal shown shows stage standard suitable supply surface Table temperature trap tube turbomolecular pump typically ultimate pressure unit usually vacuum pumps vacuum system valve vapour pressure volume wall