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aberrations accelerating voltages analysis angular aperture atomic background beam spreading bremsstrahlung calculations carbon cathodoluminescence chromatic aberration core-loss cross section crystal CTEM dark field detection detector diffraction pattern diffusion diffusion pumped discussion display dose edge effects Egerton elastic scattering electron beam electron diffraction Electron Microscopy elements EXAFS excitation exciton experimental field emission gun Figure film freeze dry function incident electron increase inelastic instruments intensity interface irradiation Isaacson lattice imaging Leapman lens limit magnetic Materials Science measured microanalysis microcomputer micrograph microscope mode molecules Monte Carlo mrad multiple scattering objective lens observed obtained operating optical P/B ratio parameters peak phase Phys plane plasmon probe problem Proc processing quantitative radiation damage ratio recorded region sample Scanning Electron Microscopy shown signal spatial resolution specimen spectra spectrometer spectroscopy spectrum structure surface techniques temperature thickness thin foils tilt tion torr vacuum Wien filters X-ray