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absorption adsorption analysis annealed applications beam bias biosensor capacitance cell chemical chip circuit CMOS coating components computation concentration conductivity deposition detection detector device effect electrical electrode electronic nose etching ethanol experimental fabricated filter fluorescence frequency function gas sensors grating humidity sensor IEEE increase input integrated interface laser layer light linear liquid material measurement membrane metal method micro microfluidic modulation molecules noise obtained operation optical fiber output oxide oxygen parameters particles peak performed phase photodetector photodiode pixel polyaniline polymer polysilicon porous silicon probe pulse quartz range refractive index resistance resistor resonator sample sensing sensitivity sensor array sensor response Sensors and Actuators shown in Figure shows signal sol-gel solution spectra structure substrate surface technique temperature thermal thermal spray thermocouple thickness thin film tion transducer ultrasonic voltage voltage bias wafer waveguide wavelength