Microelectronic Structures and MEMS for Optical Processing, Volume 2881SPIE--The International Society for Optical Engineering, 1996 - Microelectronics |
Contents
Commercializing MEMStoo fast or too slow? 288124 | 12 |
Control of a phaselocked laser diode array using piston micromirrors 288101 | 26 |
Statistical performance evaluation of electrostatic microactuators for a deformable mirror | 35 |
Copyright | |
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absorption alignment aluminum angle applications beam steering bonding boron bottom diaphragm cantilever CMOS coating cycles corner cube deposited device DFB laser diaphragm dielectric diffraction digital micromirror device display electric field electrodes electrostatic actuators experimental fabricated Fabry-Perot Fabry-Perot microcavity far-field free-space frequency groove IEEE innovation intensity laser diode lens lenses light linear material measured MEMS metal Micro Electro Mechanical microactuators microelectromechanical systems microlens microlens arrays micromachined micromirror array microoptical nitride optical elements optical fiber optical I/O coupler oxide p+ silicon P3DDT pattern phase photodetector photoresist pixel planar plate polarization polymer polysilicon post-processing precision cutting Proc reflectivity refractive rotation Schematic Sensors and Actuators shown in Figure shows signal silicon dioxide silicon mirrors SIMOX simulations single lobe SPIE sputter stress substrate surface surface micromachining surface-micromachining switch technique temperature thermal thickness top diaphragm torsional torsional springs voltage waveguide wavelength