Miniaturized Systems with Micro-optics and Micromechanics, Volume 3276SPIE--The International Society for Optical Engineering, 1998 - Integrated optics |
Contents
Optical measurement of LIGA milliengine performance 327602 | 28 |
Miniaturized fiber optical switches with nonmoving polymeric mirrors for tele | 37 |
Design and fabrication of optical MEMS using a fourlevel planarized surfacemicromachined | 48 |
Copyright | |
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achieved actuator alignment aperture applications beam bimorph cavity components coupling deflection detector developed diameter diffractive optical dipoles displacement effect Ehrfeld electrical electron electrostatic etching fabrication process fiber optic field Figure film function gear grating IEEE input insertion loss integrated optical laser laser diode layer length lens array lenses LIGA light lithography mask material measured mechanical membrane MEMS metal micro-optical microlens arrays microlens element micromotor microns microprisms Miniaturized mirror mode modulators MOEMS motion near-field NSOM optical fiber optical switches optoelectronic output packaging parameters performance phase photonic photoresist piezoelectrical piston planar plane plate polyimide polymer prism probe Proc realized refractive index replication resonant frequency sample scan angle scanner sensor shown in Fig signal silicon singlemode singlemode fiber spatial light modulators SPIE Vol star coupler structures substrate surface micromachining switching techniques temperature thermal thickness voltage wafer wavefront waveguide wavelength